Custom Enclosures and Gas Management Systems
Custom Enclosures and Gas Management Systems
Equipped with high efficiency purification and auto-control systems, and can achieve ISO-3 level cleanness

Features

Low O2 & H2O Contents
H2O<1ppm、O2<1ppm

Low Leakage Rate
<0.001vol%/h

High Cleanness
ISO-2、ISO-3(class 1)

Reliable
Parameters
- High-efficiency moisture and oxygen adsorption purifier
- O₂<1 ppm,H₂O<1 ppm
- The volume can be 25/50/100m³ or even bigger
- Auto control
- Exclusively for OLED/QLED manufacturing environment and applied to ISO-3 or even higher
- Applied to IJP environment with optional organic solvent adsorption column
- Optional adsorption column for other gases
VP-60 & VP-100 & VP-200
VP-60 | VP-100 | VP-200 | |
---|---|---|---|
Parameters | |||
Working Space(m³ ) | 25 | 50 | 100 |
Blower(m³/h) | >500 | >1000 | >2000 |
O₂(ppm) | <1 | <1 | <1 |
H₂O (ppm) | <1 | <1 | <1 |
Adsorption Content O₂(l) | 600 | 1500 | 3000 |
Adsorption Content H₂O(g) | 18000 | 50000 | 100000 |
Sensor | |||
O₂ ppm | ★ | ★ | ★ |
O₂% | ★ | ★ | ★ |
H₂O ppm | ★ | ★ | ★ |
Pressure Sensor | ★ | ★ | ★ |
Solvent Sensor | ☆ | ☆ | ☆ |
Features | |||
Leakage Rate Detection | ★ | ★ | ★ |
Curve Chart H₂O/O₂ ppm | ★ | ★ | ★ |
Curve Chart (Box Pressure) | ★ | ★ | ★ |
Automatic Regeneration | ★ | ★ | ★ |
Color Touch Screen | ★ | ★ | ★ |
Dry Vacuum Pump | ★ | ★ | ★ |
★ Standard ☆ Optional