Custom Enclosures and Gas Management Systems

Custom Enclosures and Gas Management Systems

Equipped with high efficiency purification and auto-control systems, and can achieve ISO-3 level cleanness

Features

Low O2 & H2O Contents

H2O<1ppm、O2<1ppm

Low Leakage Rate

<0.001vol%/h

High Cleanness

ISO-2、ISO-3(class 1)

Reliable

 

Parameters

  • High-efficiency moisture and oxygen adsorption purifier
  • O₂<1 ppm,H₂O<1 ppm
  • The volume can be 25/50/100m³ or even bigger
  • Auto control
  • Exclusively for OLED/QLED manufacturing environment and applied to ISO-3 or even higher
  • Applied to IJP environment with optional organic solvent adsorption column
  • Optional adsorption column for other gases
VP-60 & VP-100 & VP-200
VP-60 VP-100 VP-200
Parameters
Working Space(m³ ) 25 50 100
Blower(m³/h) >500 >1000 >2000
O₂(ppm) <1 <1 <1
H₂O (ppm) <1 <1 <1
Adsorption Content O₂(l) 600 1500 3000
Adsorption Content H₂O(g) 18000 50000 100000
Sensor
O₂ ppm
O₂%
H₂O  ppm
Pressure Sensor
Solvent Sensor
Features
Leakage Rate Detection
Curve Chart H₂O/O₂ ppm
Curve Chart (Box Pressure)
Automatic Regeneration
Color Touch Screen
Dry Vacuum Pump

★ Standard ☆ Optional