Custom Enclosures and Gas Management Systems
Custom Enclosures and Gas Management Systems
Equipped with high efficiency purification and auto-control systems, and can achieve ISO-3 level cleanness
Features
Low O2 & H2O Contents
H2O＜1ppm、O2＜1ppm
Low Leakage Rate
＜0.001vol%/h
High Cleanness
ISO-2、ISO-3（class 1）
Reliable
Parameters
- High-efficiency moisture and oxygen adsorption purifier
- O₂＜1 ppm，H₂O＜1 ppm
- The volume can be 25/50/100m³ or even bigger
- Auto control
- Exclusively for OLED/QLED manufacturing environment and applied to ISO-3 or even higher
- Applied to IJP environment with optional organic solvent adsorption column
- Optional adsorption column for other gases
VP-60 & VP-100 & VP-200
| VP-60 | VP-100 | VP-200 | |
|---|---|---|---|
| Parameters | |||
| Working Space（m³ ） | 25 | 50 | 100 |
| Blower（m³/h） | ＞500 | ＞1000 | ＞2000 |
| O₂（ppm） | ＜1 | ＜1 | ＜1 |
| H₂O （ppm） | ＜1 | ＜1 | ＜1 |
| Adsorption Content O₂（l） | 600 | 1500 | 3000 |
| Adsorption Content H₂O（g） | 18000 | 50000 | 100000 |
| Sensor | |||
| O₂ ppm | ★ | ★ | ★ |
| O₂% | ★ | ★ | ★ |
| H₂O ppm | ★ | ★ | ★ |
| Pressure Sensor | ★ | ★ | ★ |
| Solvent Sensor | ☆ | ☆ | ☆ |
| Features | |||
| Leakage Rate Detection | ★ | ★ | ★ |
| Curve Chart H₂O/O₂ ppm | ★ | ★ | ★ |
| Curve Chart (Box Pressure) | ★ | ★ | ★ |
| Automatic Regeneration | ★ | ★ | ★ |
| Color Touch Screen | ★ | ★ | ★ |
| Dry Vacuum Pump | ★ | ★ | ★ |
★ Standard ☆ Optional